J. von Berg
Technische Universität Berlin(DE)
Publications by Year
Research Areas
Advanced MEMS and NEMS Technologies, Silicon Carbide Semiconductor Technologies, Gas Sensing Nanomaterials and Sensors, Sensor Technology and Measurement Systems, Electrical and Thermal Properties of Materials
Most-Cited Works
- → A high temperature pressure sensor prepared by selective deposition of cubic silicon carbide on SOI substrates(1999)58 cited
- → A high temperature pressure sensor with β-SiC piezoresistors on SOI substrates(2002)41 cited
- → High temperature piezoresistive β-SiC-on-SOI pressure sensor with on chip SiC thermistor(1999)33 cited
- → High Temperature Piezoresistive β-SiC-on-SOI Pressure Sensor for Combustion Engines(1998)16 cited
- → Measurement of the cylinder pressure in combustion engines with a piezoresistive β-SiC-on-SOI pressure sensor(2002)13 cited
- → Experimental lithium system. Final report(1985)8 cited
- → A Piezoresistive Low-Pressure Sensor Fabricated Using Silicon-on-Insulator (SOI) for Harsh Environment Applications(2001)7 cited
- → An advanced MEMS sensor packaging concept for use in harsh environments(2013)6 cited
- → Benefits of a Cylinder Pressure Based Engine Management System on a Vehicle(2002)5 cited
- → Overview: Principles and Technologies for Pressure Sensors for Automotive Applications(2002)3 cited