Mitsuhiro Shikida
Topsham Museum(GB)Hiroshima City University(JP)
Publications by Year
Research Areas
Advanced MEMS and NEMS Technologies, Advanced Sensor and Energy Harvesting Materials, Advanced Surface Polishing Techniques, Neuroscience and Neural Engineering, Force Microscopy Techniques and Applications
Most-Cited Works
- → Characterization of orientation-dependent etching properties of single-crystal silicon: effects of KOH concentration(1998)318 cited
- → Differences in anisotropic etching properties of KOH and TMAH solutions(2000)249 cited
- → Anisotropic etching rates of single-crystal silicon for TMAH water solution as a function of crystallographic orientation(1999)151 cited
- → Tensile testing of silicon film having different crystallographic orientations carried out on a silicon chip(1998)150 cited
- → Cell culture arrays using magnetic force-based cell patterning for dynamic single cell analysis(2007)146 cited
- → Roughening of single-crystal silicon surface etched by KOH water solution(1999)132 cited