Frank Chilese
Publications by Year
Research Areas
Advancements in Photolithography Techniques, Spectroscopy and Laser Applications, Thin-Film Transistor Technologies, Plasma Diagnostics and Applications, Advanced Surface Polishing Techniques
Most-Cited Works
- → Stable Isotope Ratios Using Cavity Ring-Down Spectroscopy: Determination of 13C/12C for Carbon Dioxide in Human Breath(2002)252 cited
- → Predictive and corrective model for bulk heating distortion in photomasks(2000)6 cited
- → Protection of extreme ultraviolet lithography masks. I. Thermophoretic protection factors at low pressure for diffusing nanoscale particles(2015)5 cited
- → Protection of extreme ultraviolet lithography masks. II. Showerhead flow mitigation of nanoscale particulate contamination(2015)2 cited
- → Elements of an advanced pattern generator for 130- to 100-nm maskmaking(2000)2 cited
- Particle and chemical control using tunnel flow(2023)
- → Applications of advanced light sources to cavity ring-down spectroscopy(2003)