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Taku Gohira | doi.page

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Taku Gohira

Tokyo Electron (Japan)(JP)

Research Areas

Plasma Applications and Diagnostics, Plasma Diagnostics and Applications, Laser-induced spectroscopy and plasma

Most-Cited Works

→ Study of optical emission spectroscopy using modified Boltzmann plot in dual-frequency synchronized pulsed capacitively coupled discharges with DC bias at low-pressure in Ar/O₂/C₄F₈ plasma etching process(2022)11 cited