S. Schiller
University of Hildesheim(DE)University of Applied Sciences and Arts Hildesheim/Holzminden/Göttingen(DE)Intelligent Transport Systems Niedersachsen(DE)
Publications by Year
Research Areas
Metal and Thin Film Mechanics, Copper Interconnects and Reliability, Occupational Therapy Practice and Research, Semiconductor materials and devices, Plasma Diagnostics and Applications
Most-Cited Works
- → Pulsed magnetron sputter technology(1993)336 cited
- → Reactive high rate D.C. sputtering: Deposition rate, stoichiometry and features of TiOx and TiNx films with respect to the target mode(1984)145 cited
- → Reactive d.c. high-rate sputtering as production technology(1987)116 cited
- → Influence of deposition parameters on the optical and structural properties of TiO2 films produced by reactive d.c. plasmatron sputtering(1981)99 cited
- → Reactive D.C. sputtering with the magnetron-plasmatron for tantalum pentoxide and titanium dioxide films(1979)63 cited
- → On the investigation of d.c. plasmatron discharges by optical emission spectrometry(1982)55 cited