Thomas Rügamer
Publications by Year
Research Areas
Semiconductor materials and devices, Advancements in Semiconductor Devices and Circuit Design, High-Temperature Coating Behaviors, Plasma Diagnostics and Applications, Nanowire Synthesis and Applications
Most-Cited Works
- → One-Step Chemical Vapor Growth of Ge/SiCxNy Nanocables(2007)25 cited
- → Investigations on Chemical Vapour Deposition of Magnesium‐Boron‐Containing Metal‐Organic Precursors(2007)3 cited
- → Prozessentwicklung zur Herstellung von Zinnoxid- und Zirkoniumoxidschichten in der plasmaunterstützten chemischen Gasphasenabscheidung(2011)