Ε. Obermeier
Technische Universität Berlin(DE)
Publications by Year
Research Areas
Advanced MEMS and NEMS Technologies, Gas Sensing Nanomaterials and Sensors, Analytical Chemistry and Sensors, Advanced Sensor Technologies Research, Mechanical and Optical Resonators
Most-Cited Works
- → A new analytical solution for the load-deflection of square membranes(1995)208 cited
- → Thermal, Conductivity, Density, Viscosity, and Prandtl‐Numbers of Ethylene Glycol‐Water Mixtures(1984)192 cited
- → Microactuators and their technologies(2000)186 cited
- → Piezoresistive pressure sensors based on polycrystalline silicon(1991)155 cited
- → Sputtered molybdenum oxide thin films for NH3 detection(1996)138 cited
- → Polysilicon as a material for microsensor applications(1992)123 cited
- → Elastic properties and microstructure of LPCVD polysilicon films(1996)107 cited