Kazunori Tsujimoto
Kobe University(JP)
Publications by Year
Research Areas
Semiconductor materials and devices, Plasma Diagnostics and Applications, Metal and Thin Film Mechanics, Ion-surface interactions and analysis, Copper Interconnects and Reliability
Most-Cited Works
- → Low-temperature reactive ion etching and microwave plasma etching of silicon(1988)327 cited
- → Low-temperature dry etching(1991)149 cited
- → Deposition in Dry-Etching Gas Plasmas(1992)44 cited
- → Low-Damage Damascene Patterning Using Porous Inorganic Low-Dielectric-Constant Materials(2005)43 cited
- → Low-Temperature Microwave Plasma Etching of Crystalline Silicon(1991)38 cited
- → Mechanism of Radiation Damage in SiO2/Si Induced by vuv Photons(1990)36 cited
- → Chronic invasive sinus and intracerebral aspergillosis controlled by combination therapy with micafungin and a daily dose of 400 mg itraconazole oral solution(2014)22 cited
- → Short-gas-residence-time electron cyclotron resonance plasma etching(1994)21 cited
- → Lower plasma-induced damage in SiO2/Si at lower temperatures(1990)15 cited
- → Near-surface interactions and their etching-reaction model in metal plasma-assisted etching(1998)15 cited