Thomas Steinhäusler
Publications by Year
Research Areas
Chemical Synthesis and Analysis, Advancements in Photolithography Techniques, Synthetic Organic Chemistry Methods, Organometallic Complex Synthesis and Catalysis, Nanofabrication and Lithography Techniques
Most-Cited Works
- → A Water-Castable, Water-Developable Chemically Amplified Negative-Tone Resist(1997)37 cited
- → Ring opening metathesis polymerization of methyl-N-(1-phenylethyl)-2-azabicyclo[2.2.1]hept-5-ene-3-carboxylate(1997)20 cited
- → Optically active polymers via ring-opening metathesis polymerization: 1. Polymers from enantiomerically pure 2-acyloxybicyclo[2.2.1]hept-5-enes(1994)15 cited
- → Optically active polymers via ring-opening metathesis polymerization: 2. Polymerization of enantiomerically pure ( ± )-endo-2-norbornenyl acetate(1994)12 cited
- → Lithographic performance of 193 nm single and bi-layer materials.(1998)3 cited
- → Advances in Resist Materials for 193 nm Lithography.(1999)2 cited