T. Suren Lewkebandara
Wayne State University(US)
Publications by Year
Research Areas
Metal and Thin Film Mechanics, Semiconductor materials and devices, Inorganic Chemistry and Materials, Synthesis and characterization of novel inorganic/organometallic compounds, Copper Interconnects and Reliability
Most-Cited Works
- → A single-source precursor to titanium nitride thin films. Evidence for the intermediacy of imido complexes in the chemical vapor deposition process(1992)112 cited
- → Terminal and Bridging Imido Complexes from Titanium Tetrachloride and Primary Amines. Implications for the Chemical Vapor Deposition of Titanium Nitride Films(1994)86 cited
- → [TiCl4(NH3)2]: An Improved Single-Source Precursor to Titanium Nitride Films. Crystal and Molecular Structure of [TiCl4(TPPO)2] (TPPO = tripiperidinophosphine Oxide(1994)56 cited
- → Adducts of Titanium Tetrachloride with Alkylselenium Compounds: Molecular Precursors to Titanium Diselenide Films(1998)42 cited
- → A class of single-source precursors to titanium disulfide films. Synthesis, structure, and chemical vapor deposition studies of [TiCl4(HSR)2](1993)41 cited
- → Adducts of titanium tetrachloride with organosulfur compounds. Crystal and molecular structures of TiCl4(C4H8S)2 and (TiCl4)2(CH3SSCH3)(1998)39 cited
- → Precursor for the Low-Temperature Deposition of Titanium Phosphide Films(1995)32 cited
- → CVD routes to titanium disulfide films(1994)24 cited
- → Low-temperature atmospheric pressure chemical vapor deposition of titanium disulfide films(1992)20 cited
- → Low-temperature deposition of titanium nitride films from dialkylhydrazine-based precursors(1999)15 cited