Paul Denham
University of California, Los Angeles(US)UCLA Health(US)
Publications by Year
Research Areas
Advancements in Photolithography Techniques, Electron and X-Ray Spectroscopy Techniques, Advanced X-ray Imaging Techniques, Integrated Circuits and Semiconductor Failure Analysis, Particle Accelerators and Free-Electron Lasers
Most-Cited Works
- → Calibration and standards beamline 6.3.2 at the Advanced Light Source(1996)78 cited
- → Status of EUV micro-exposure capabilities at the ALS using the 0.3-NA MET optic(2004)69 cited
- → Critical challenges for EUV resist materials(2011)62 cited
- → Absolute photoabsorption measurements of Mg, Al, and Si in the soft-x-ray region below theL2,3edges(1994)54 cited
- → Fourier-synthesis custom-coherence illuminator for extreme ultraviolet microfield lithography(2003)45 cited
- → Hidden planetary friends: on the stability of two-planet systems in the presence of a distant, inclined companion(2018)40 cited