Ferhat Aydinoglu
University of Waterloo(CA)
Publications by Year
Research Areas
Nanofabrication and Lithography Techniques, Semiconductor materials and devices, Nanowire Synthesis and Applications, Advancements in Photolithography Techniques, Advancements in Semiconductor Devices and Circuit Design
Most-Cited Works
- → Silicon nanostructures with very large negatively tapered profile by inductively coupled plasma-RIE(2016)25 cited
- → Chromium oxide as a hard mask material better than metallic chromium(2017)16 cited
- → Effect of oxygen plasma cleaning on nonswitching pseudo-Bosch etching of high aspect ratio silicon pillars(2020)13 cited
- → E-beam lithography using dry powder resist of hydrogen silsesquioxane having long shelf life(2019)11 cited
- → Grafted Polystyrene Monolayer Brush as Both Negative and Positive Tone Electron Beam Resist(2017)11 cited
- → Electron Beam Lithography on Irregular Surface Using Grafted PMMA Monolayer as Resist(2016)11 cited
- → Mixture of ZEP and PMMA with varying ratios for tunable sensitivity as a lift-off resist with controllable undercut(2016)7 cited
- → Single Layer Surface-Grafted PMMA as a Negative-Tone e-Beam Resist(2017)7 cited
- → High resolution nanofabrication using self-assembly of metal salt-polymer nanocomposite film(2015)1 cited
- Silicon MOSFET quantum dots with simplified metal-gate geometry(2019)