Taewon Cha
Samsung (South Korea)(KR)
Publications by Year
Research Areas
Semiconductor materials and devices, Plasma Diagnostics and Applications, Copper Interconnects and Reliability, Laser-induced spectroscopy and plasma, Industrial Vision Systems and Defect Detection
Most-Cited Works
- → Predictive control of the plasma processes in the OLED display mass production referring to the discontinuity qualifying PI-VM(2020)16 cited
- → Cause analysis of the faults in HARC etching processes by using the PI‐VM model for OLED display manufacturing(2019)10 cited
- → Application of PI-VM for management of the metal target plasma etching processes in OLED display manufacturing(2018)10 cited