A. W. Ott
Publications by Year
Research Areas
Semiconductor materials and devices, Silicon Nanostructures and Photoluminescence, Copper Interconnects and Reliability, ZnO doping and properties, Metal and Thin Film Mechanics
Most-Cited Works
- → Surface Chemistry for Atomic Layer Growth(1996)673 cited
- → Al3O3 thin film growth on Si(100) using binary reaction sequence chemistry(1997)508 cited
- → Surface chemistry of Al2O3 deposition using Al(CH3)3 and H2O in a binary reaction sequence(1995)458 cited
- → A 65nm logic technology featuring 35nm gate lengths, enhanced channel strain, 8 Cu interconnect layers, low-k ILD and 0.57 μm/sub 2/ SRAM cell(2005)230 cited
- → Atomic layer-controlled growth of transparent conducting ZnO on plastic substrates(1999)154 cited
- → Atomic layer growth of SiO2 on Si(100) using SiCl4 and H2O in a binary reaction sequence(1995)137 cited
- → Atomic layer controlled deposition of Al2O3 films using binary reaction sequence chemistry(1996)130 cited
- → Atomic layer controlled growth of SiO2 films using binary reaction sequence chemistry(1997)97 cited
- → Atomic layer controlled growth of Si3N4 films using sequential surface reactions(1998)96 cited
- → NHC-Catalyzed Reactions of Aryloxyacetaldehydes: A Domino Elimination/Conjugate Addition/Acylation Process for the Synthesis of Substituted Coumarins(2008)85 cited