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Marcel Heertjes

Eindhoven University of Technology(NL)ASML (Netherlands)(NL)ASML (Netherlands)(NL)

Publications by Year

Research Areas

Iterative Learning Control Systems, Advanced Control Systems Optimization, Structural Health Monitoring Techniques, Control Systems and Identification, Adaptive Control of Nonlinear Systems

Most-Cited Works

→ MIMO feed-forward design in wafer scanners using a gradient approximation-based algorithm(2010)110 cited
→ Constrained Iterative Feedback Tuning for Robust Control of a Wafer Stage System(2015)106 cited
→ Industry engagement with control research: Perspective and messages(2020)98 cited
→ Control of Wafer Scanners: Methods and Developments(2020)77 cited
→ Nonlinear iterative learning control with applications to lithographic machinery(2007)72 cited
→ Frequency-domain tools for stability analysis of reset control systems(2017)66 cited

→ Performance of convergence-based variable-gain control of optical storage drives(2007)

56 cited

→ Nonlinear Dynamics and Control of a Pneumatic Vibration Isolator(2005)55 cited

→ Performance-Improved Design of N-PID Controlled Motion Systems With Applications to Wafer Stages(2009)51 cited

→ Self-tuning MIMO disturbance feedforward control for active hard-mounted vibration isolators(2017)49 cited