Shin Yokoyama
Nagano Red Cross Hospital(JP)
Publications by Year
Research Areas
Photonic and Optical Devices, Semiconductor materials and devices, Semiconductor Lasers and Optical Devices, Advancements in Semiconductor Devices and Circuit Design, Integrated Circuits and Semiconductor Failure Analysis
Most-Cited Works
- → Atomic layer controlled deposition of silicon nitride with self-limiting mechanism(1996)91 cited
- → Detection of antibody-antigen reaction by silicon nitride slot-ring biosensors using protein G(2015)67 cited
- → Atomic layer controlled deposition of silicon nitride and in situ growth observation by infrared reflection absorption spectroscopy(1997)56 cited
- → Low-temperature formation of silicon nitride gate dielectrics by atomic-layer deposition(2001)55 cited
- → Electron Spin Resonance in Discharge-Produced Silicon Nitride(1981)54 cited
- → Atomic-layer selective deposition of silicon nitride on hydrogen-terminated Si surfaces(1998)47 cited
- → NH 3 -annealed atomic-layer-deposited silicon nitride as a high- gate dielectric with high reliability