Shaowen Gao
GlobalFoundries (United States)(US)
Publications by Year
Research Areas
Advancements in Photolithography Techniques, Electron and X-Ray Spectroscopy Techniques, Industrial Vision Systems and Defect Detection, Photonic and Optical Devices, Electronic Packaging and Soldering Technologies
Most-Cited Works
- → Optimizing OPC data sampling based on "orthogonal vector space"(2011)16 cited
- → Numerical Analysis of Multilayer Waveguides Using Effective Refractive Index Method(2003)7 cited
- → Investigation of trench and contact hole shrink mechanism in the negative tone develop process(2013)4 cited
- → Process window tripling by optimized SRAF placement rules: AP/DFM: Advanced patterning/design for manufacturability(2016)3 cited
- → Combinational optical rule check on hotspot detection(2018)2 cited
- → An Emphasis of Electron Energy Calculation in Quantum Wells(2004)2 cited
- Optimizing OPC data sampling based on(2011)