Pedro Herrera
Publications by Year
Research Areas
Advancements in Photolithography Techniques, Optical Coatings and Gratings, Advanced Surface Polishing Techniques, Surface Roughness and Optical Measurements, Integrated Circuits and Semiconductor Failure Analysis
Most-Cited Works
- → Near-Infrared Spectroscopy and Spectral Mapping of Jupiter and the Galilean Satellites: Results from Galileo's Initial Orbit(1996)171 cited
- → Correlating scatterometry to CD-SEM and electrical gate measurements at the 90-nm node using TMU analysis(2004)21 cited
- → Use of multiple azimuthal angles to enable advanced scatterometry applications(2010)19 cited
- → Enabling Scatterometry as an In-Line Measurement Technique for 32 nm BEOL Application(2011)16 cited
- → Spectral scatterometry for 2D trench metrology of low-K dual-damascene interconnect(2002)12 cited
- → Characterization of 32nm node BEOL grating structures using scatterometry(2008)8 cited
- → Implementation of spectroscopic critical dimension (SCD) (TM) for gate CD control and stepper characterization(2001)8 cited
- → Predicting electrical measurements by applying scatterometry to complex spacer structures(2007)7 cited
- → Monitoring process-induced focus errors using high-resolution flatness metrology(2015)6 cited
- → Assessing scatterometry for measuring advanced spacer structures with embedded SiGe(2008)5 cited