Zhaoyuan Ning
Publications by Year
Research Areas
Metal and Thin Film Mechanics, Copper Interconnects and Reliability, Diamond and Carbon-based Materials Research, Semiconductor materials and devices, Plasma Diagnostics and Applications
Most-Cited Works
- → Deposition of diamond-like carbon films by electrolysis of methanol solution(1996)115 cited
- → Spectroscopic study on rotational and vibrational temperature of N2 and N2+ in dual-frequency capacitively coupled plasma(2008)64 cited
- → Deposition of unbydrogenated diamond-like amorphous carbon films by electrolysis of organic solutions(1997)42 cited
- → Influence of deposition pressure on the structure and properties of fluorinated diamond-like carbon films prepared by RF reactive magnetron sputtering(2005)31 cited
- → Study of structural and optical properties of Ge doped ZnO films(2009)26 cited
- → Effect of Si–OH group on characteristics of SiCOH films prepared by decamethylcyclopentasiloxane electron cyclotron resonance plasma(2005)19 cited
- → Microstructure and dielectric properties of silicon nitride films deposited by electron cyclotron resonance plasma chemical vapor deposition(1998)19 cited
- → Pulsed electrodeposition of diamond-like carbon films(1997)19 cited
- → Study of effect of H 2 addition on the production of fluorocarbon radicals in H 2 /C 4 F 8 inductively coupled plasma via optical emission spectroscopy actinometry(2005)17 cited
- → Effect of low-frequency power on etching of SiCOH low-k films in CHF3 13.56MHz/2MHz dual-frequency capacitively coupled plasma(2008)16 cited