Linyong Pang
Dassault Systèmes (United States)(US)
Publications by Year
Research Areas
Advancements in Photolithography Techniques, Industrial Vision Systems and Defect Detection, Electron and X-Ray Spectroscopy Techniques, Welding Techniques and Residual Stresses, Nanofabrication and Lithography Techniques
Most-Cited Works
- → Fast inverse lithography technology(2006)98 cited
- → Inverse Lithography Technology (ILT): what is the impact to the photomask industry?(2006)82 cited
- → Inverse lithography technology: 30 years from concept to practical, full-chip reality(2021)73 cited
- → Inverse lithography technology principles in practice: unintuitive patterns(2005)43 cited
- → Considering MEEF in inverse lithography technology (ILT) and source mask optimization (SMO)(2008)34 cited
- → Inverse lithography technology (ILT): a natural solution for model-based SRAF at 45nm and 32nm(2007)34 cited
- → Validation of inverse lithography technology (ILT) and its adaptive SRAF at advanced technology nodes(2008)32 cited
- → Pushing the lithography limit: applying inverse lithography technology (ILT) at the 65nm generation(2006)24 cited
- → Source-mask co-optimization (SMO) using level set methods(2009)23 cited
- → Inverse lithography technology (ILT): keep the balance between SRAF and MRC at 45 and 32 nm(2007)22 cited