Yunfei Deng
Civil Aviation University of China(CN)Dalian Maritime University(CN)
Publications by Year
Research Areas
Advancements in Photolithography Techniques, Integrated Circuits and Semiconductor Failure Analysis, Electron and X-Ray Spectroscopy Techniques, Advanced Surface Polishing Techniques, Optical Coatings and Gratings
Most-Cited Works
- → A novel and facile-to-synthesize three-dimensional honeycomb-like nano-Fe3O4@C composite: Electromagnetic wave absorption with wide bandwidth(2020)95 cited
- → Integration of EUV lithography in the fabrication of 22-nm node devices(2009)51 cited
- → The use of EUV lithography to produce demonstration devices(2008)42 cited
- → Decomposition strategies for self-aligned double patterning(2010)41 cited
- → Ultrafine FeNi3 Nanocrystals Embedded in 3D Honeycomb-Like Carbon Matrix for High-Performance Microwave Absorption(2020)32 cited
- → Resist pattern prediction at EUV(2010)30 cited
- → Extreme ultraviolet mask defect simulation: Low-profile defects(2000)27 cited