S. S. Borisov
P.N. Lebedev Physical Institute of the Russian Academy of Sciences(RU)
Publications by Year
Research Areas
Electron and X-Ray Spectroscopy Techniques, Advancements in Photolithography Techniques, Surface and Thin Film Phenomena, Semiconductor materials and devices, Integrated Circuits and Semiconductor Failure Analysis
Most-Cited Works
- → EBIC measurements of small diffusion length in semiconductor structures(2007)55 cited
- → CHARIOT: Software tool for modeling SEM signal and e-beam lithography(2008)35 cited
- → Angular Molecular–Electronic Sensor with Negative Magnetohydrodynamic Feedback(2018)29 cited
- → Contrast reversal effect in scanning electron microscopy due to charging(2009)27 cited
- → Modeling of linewidth measurement in scanning electron microscopes using advanced Monte Carlo software(2006)17 cited
- → Simulation of scanning electron microscope images taking into account local and global electromagnetic fields(2010)17 cited
- → Investigation of factors causing difference between simulation and real SEM image(2009)