Joseph S. Gordon
Publications by Year
Research Areas
Advancements in Photolithography Techniques, Intelligence, Security, War Strategy, Industrial Vision Systems and Defect Detection, Thermodynamic properties of mixtures, Nanofabrication and Lithography Techniques
Most-Cited Works
- → Novel hydrofluorocarbon polymers for use as pellicles in 157 nm semiconductor photolithography: fundamentals of transparency(2003)55 cited
- → The Entropy of Ethyl Chloride. Heat Capacity from 13 to 287°K. Vapor Pressure. Heats of Fusion and Vaporization(1948)37 cited
- → Strategic Warning Intelligence(2019)21 cited
- → Materials design and development of fluoropolymers for use as pellicles in 157-nm photolithography(2001)18 cited
- Industrial design of plastics products(2003)
- → U.S. Strategic Warning Intelligence: Situation and Prospects(2017)9 cited
- → Influence of environmental components on haze growth(2007)9 cited
- → Use of excimer laser test system for studying haze growth(2005)8 cited
- → Optical issues of thin organic pellicles in 45-nm and 32-nm immersion lithography(2006)7 cited
- → Study of time dependent 193 nm reticle haze(2007)3 cited