L. M. Shirey
United States Naval Research Laboratory(US)
Publications by Year
Research Areas
Advancements in Photolithography Techniques, Nanofabrication and Lithography Techniques, Metal and Thin Film Mechanics, Plasma Diagnostics and Applications, Semiconductor materials and devices
Most-Cited Works
- → Low-Loss, Extreme Subdiffraction Photon Confinement via Silicon Carbide Localized Surface Phonon Polariton Resonators(2013)306 cited
- → Proximity X-ray Lithography Using Self-Assembled Alkylsiloxane Films: Resolution and Pattern Transfer(2000)64 cited
- → Imaging layers for 50 kV electron beam lithography: Selective displacement of noncovalently bound amine ligands from a siloxane host film(2001)49 cited
- → Nanolithography by displacement of catalytic metal clusters using an atomic force microscope tip(1997)26 cited
- → Photoresist channel-constrained deposition of electroless metallization on ligating self-assembled films(1994)20 cited
- → Nanolithography in polymethylmethacrylate: An atomic force microscope study(1998)18 cited
- → Electron-beam nanolithography, acid diffusion, and chemical kinetics in SAL-601(1998)15 cited
- → Thin silicon nitride films for reduction of linewidth and proximity effects in e-beam lithography(1992)13 cited
- → Resolution of polymethyl methacrylate: Molecular weights of 950 000 vs 50 000(1999)10 cited
- → Surface characterization of multilayer x-ray diffraction specimens(1991)9 cited