Meint J. de Boer
University of Twente(NL)
Publications by Year
Research Areas
Advanced MEMS and NEMS Technologies, Microfluidic and Capillary Electrophoresis Applications, Mechanical and Optical Resonators, Force Microscopy Techniques and Applications, Advanced Sensor and Energy Harvesting Materials
Most-Cited Works
- → Silicon micromachined hollow microneedles for transdermal liquid transport(2003)404 cited
- → Black silicon method: X. A review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as a roadmap to next generation equipment(2009)288 cited
- → Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures(2002)262 cited
- → Micromachining of buried micro channels in silicon(2000)185 cited
- → Micromachined fountain pen for atomic force microscope-based nanopatterning(2004)91 cited
- → Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels(2007)90 cited