Mars Chung

Publications by Year

Research Areas

Semiconductor materials and devices, Advancements in Semiconductor Devices and Circuit Design, Nanowire Synthesis and Applications, Advancements in Photolithography Techniques, Electron and X-Ray Spectroscopy Techniques

Most-Cited Works

• → Characterization of repairs to KrF 300mm wafer printability for 0.13μm design rule with attenuated phase-shifting mask(2002)4 cited
• True Silicon-On-Nothing MOSFETs fabricated by Si layer transfer over a pre-etched cavity(2007)