Yongsuk Jang
Seoul National University(KR)Samsung (South Korea)(KR)
Publications by Year
Research Areas
Plasma Diagnostics and Applications, Semiconductor materials and devices, Thin-Film Transistor Technologies, Industrial Vision Systems and Defect Detection, Surface Roughness and Optical Measurements
Most-Cited Works
- → Plasma information-based virtual metrology (PI-VM) and mass production process control(2022)16 cited
- → Predictive control of the plasma processes in the OLED display mass production referring to the discontinuity qualifying PI-VM(2020)16 cited
- → Cause analysis of the faults in HARC etching processes by using the PI‐VM model for OLED display manufacturing(2019)10 cited
- → Application of PI-VM for management of the metal target plasma etching processes in OLED display manufacturing(2018)10 cited
- → Micro-range uniformity control of the etching profile in the OLED display mass production referring to the PI-VM model(2021)8 cited