Mei Chang
Publications by Year
Research Areas
Semiconductor materials and devices, Metal and Thin Film Mechanics, Copper Interconnects and Reliability, Advancements in Semiconductor Devices and Circuit Design, Integrated Circuits and Semiconductor Failure Analysis
Most-Cited Works
- → Graft Copolymers with Regularly Spaced, Tetrafunctional Branch Points: Morphology and Grain Structure(2000)112 cited
- → Whisker growth in reduction of oxides(1984)28 cited
- → Interreaction Between Al 2 O 3 and a CaO‐Al 2 O 3 Melt(1984)25 cited
- → Development of tungsten nitride film as barrier layer for copper metallization(2000)23 cited
- → Highly Selective SiO2 Etch Employing Inductively Coupled Hydro-Fluorocarbon Plasma Chemistry for Self Aligned Contact Etch(1997)16 cited
- → Control of bombardment energy and energetic species toward a superdense titanium nitride film(2010)10 cited
- → Response surface modeling of high pressure chemical vapor deposited blanket tungsten(1991)9 cited
- → Passivation of InGaAs(001)-(2 × 4) by Self-Limiting Chemical Vapor Deposition of a Silicon Hydride Control Layer(2015)8 cited
- → Chemical Vapor Deposition(2007)6 cited
- → Surface Oxygen Chemical Potential in a Gas‐Solid Reaction(1983)5 cited