J. Orth
Advanced Micro Devices (United States)(US)
Publications by Year
Research Areas
Advancements in Photolithography Techniques, Integrated Circuits and Semiconductor Failure Analysis, Advanced Surface Polishing Techniques, Electron and X-Ray Spectroscopy Techniques, Industrial Vision Systems and Defect Detection
Most-Cited Works
- → Methodology for the optimization of an i-line lithographic process for defect reduction(1998)3 cited
- → The application of lithography defect simulation to submicron CMOS yield improvement efforts(2002)1 cited
- → The application of submicron lithography defect simulation to IC yield improvement(1999)1 cited
- → Photoresist defect diagnosis using a rigorous topography simulator(2002)
- → Novel approach for defect detection and reduction techniques for submicron lithography(1997)