Iwao Nishiyama
Nagoya University(JP)
Publications by Year
Research Areas
Advancements in Photolithography Techniques, Electron and X-Ray Spectroscopy Techniques, Integrated Circuits and Semiconductor Failure Analysis, Semiconductor materials and devices, Optical Coatings and Gratings
Most-Cited Works
- → Effects of High Temperature on the Development of Pollen Mother Cells and Microspores in Barley Hordeum vulgare L.(2000)144 cited
- → Acid generation efficiency in a model system of chemically amplified extreme ultraviolet resist(2006)125 cited
- → Male Sterility Caused by Cooling Treatment at the Meiotic Stage in Rice Plants : II. The most sensitive stage to cooling and the fertilizing ability of pistils(1969)90 cited
- → Ultrathin Tantalum Oxide Capacitor Dielectric Layers Fabricated Using Rapid Thermal Nitridation prior to Low Pressure Chemical Vapor Deposition(1993)85 cited
- → Development of the point diffraction interferometer for extreme ultraviolet lithography: Design, fabrication, and evaluation(2002)75 cited
- → Reduction of oxide layer on Ru surface by atomic-hydrogen treatment(2005)58 cited