Tadao Kato
Publications by Year
Research Areas
Integrated Circuits and Semiconductor Failure Analysis, Semiconductor materials and devices, Advancements in Photolithography Techniques, Advanced Surface Polishing Techniques, Electron and X-Ray Spectroscopy Techniques
Most-Cited Works
- → Cold and Low-Energy Ion Etching (COLLIE)(1989)35 cited
- → Dielectric breakdown of silicon oxide studied by scanning probe microscopy(1997)26 cited
- → Unique resist profiles with Be and Si focused ion beam lithography(1986)21 cited
- → Characterization of Silicon Implanted with Focused Ion Beam by Raman Microprobe(1987)18 cited
- → I–V characteristics of modified silicon surface using scanning probe microscopy(1997)13 cited
- → Stable performance Nb variable thickness microbridge type Josephson junctions: A reproducible fabrication technique(1983)6 cited
- → Effect of Helium Gas Pressure on X-Ray Mask Heating during Synchrotron Radiation Exposure(1995)4 cited
- → Microfabrication Technique by Gas Plasma Etching Method(1976)4 cited
- → Electron-beam exposure profiles in polymer films for metallic film mask fabrication(1978)4 cited
- → Studies on Oxidative Degradation of Polyethylene Terephthalate by Differential Thermal Analysis(1966)2 cited