Decrease in gap states at ultrathin SiO2/Si interfaces by crown-ether cyanide treatment
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Abstract
A simple method to passivate interface states at ultrathin SiO2/Si interfaces is developed. In this method, ultrathin SiO2-covered Si is immersed in a KCN solution containing crown-ether, followed by a rinse in water at 25 °C. The conductance–voltage measurements show that the interface state density is decreased to ∼1/10 by this crown-ether cyanide treatment. The capacitance–voltage measurements show that contamination by K+ ions is effectively avoided by the inclusion of crown-ether. These results demonstrate that crown-ether molecules effectively capture K+ ions and consequently CN− ions effectively may react with defect states, probably forming Si–CN bonds. The passivation of interface states by the cyanide treatment improves the electrical characteristics of metal–oxide–semiconductor tunneling diodes.
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