Disc-shaped nanocrystal model for simulating the diffraction peak profile from a one-dimensional superlattice and its application to Pt/AlN superlattice films
Journal of Applied Crystallography2016Vol. 49(3), pp. 909–917
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Abstract
On the basis of the film structure of a Pt/AlN multilayer film which exhibits a superlattice peak after annealing, a disc-shaped nanocrystal model is proposed for simulating the diffraction line profile from a one-dimensional superlattice. The proposed model demonstrates that a superlattice peak can arise even from just two disc-shaped nanocrystals and even with a large misorientation (a few degrees), provided both the thickness and the in-plane crystal size of the nanocrystals are of the order of nanometres. Using the model, the superlattice peaks from Pt/AlN superlattices are analysed quantitatively and the effect of annealing on the film is discussed.
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