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Study of silicon photonics based on standard CMOS foundry

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE2010Vol. 7847, pp. 78470E–78470E

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Jianyi Yang, Yong Zhao, Chen Qiu, Wanjun Wang, Guomin Jiang, Yinlei Hao, Xiaoqing Jiang

Abstract

Silicon photonics can found applications in optical interconnects and optical signal processing. Recent years, silicon photonics was developed rapidly. In this paper, we report our research work on silicon photonics. Based on the standard CMOS foundry, we studied the silicon waveguides and related photonic components.

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