Titta Aaltonen
Harvard University(US)University of Oslo(NO)
Publications by Year
Research Areas
Semiconductor materials and devices, Electronic and Structural Properties of Oxides, Copper Interconnects and Reliability, Catalytic Processes in Materials Science, Advancements in Battery Materials
Most-Cited Works
- → Atomic Layer Deposition of Platinum Thin Films(2003)385 cited
- → Ruthenium Thin Films Grown by Atomic Layer Deposition(2003)273 cited
- → Reaction Mechanism Studies on Atomic Layer Deposition of Ruthenium and Platinum(2003)237 cited
- → Atomic layer deposition of noble metals: Exploration of the low limit of the deposition temperature(2004)162 cited
- → Atomic Layer Deposition of Iridium Thin Films(2004)150 cited
- → Atomic Layer Deposition of Ruthenium Thin Films from Ru(thd)3 and Oxygen(2004)148 cited
- → Electrodeposition of Cu on Ru Barrier Layers for Damascene Processing(2005)114 cited
- → Glass-Encapsulated Light Harvesters: More Efficient Dye-Sensitized Solar Cells by Deposition of Self-Aligned, Conformal, and Self-Limited Silica Layers(2012)105 cited
- → Atomic Layer Deposition of Li2O–Al2O3 Thin Films(2011)103 cited
- → Lanthanum titanate and lithium lanthanum titanate thin films grown by atomic layer deposition(2010)99 cited