Hyun-Joon Roh
Yonsei University(KR)
Publications by Year
Research Areas
Plasma Diagnostics and Applications, Metal and Thin Film Mechanics, Fuel Cells and Related Materials, Membrane-based Ion Separation Techniques, Industrial Vision Systems and Defect Detection
Most-Cited Works
- → Enhancement of the Virtual Metrology Performance for Plasma-Assisted Oxide Etching Processes by Using Plasma Information (PI) Parameters(2015)38 cited
- → Development of the Virtual Metrology for the Nitride Thickness in Multi-Layer Plasma-Enhanced Chemical Vapor Deposition Using Plasma-Information Variables(2018)36 cited
- → Characteristics of a non-Maxwellian electron energy distribution in a low-pressure argon plasma(2014)21 cited
- → Determination of electron energy probability function in low-temperature plasmas from current – Voltage characteristics of two Langmuir probes filtered by Savitzky–Golay and Blackman window methods(2015)18 cited
- → Plasma information-based virtual metrology (PI-VM) and mass production process control(2022)16 cited
- → Design of optical emission spectroscopy based plasma parameter controller for real-time advanced equipment control(2017)12 cited
- → Characteristics of a plasma information variable in phenomenology-based, statistically-tuned virtual metrology to predict silicon dioxide etching depth(2019)11 cited
- → Ion-neutral collision effect on ion-ion two-stream-instability near sheath-presheath boundary in two-ion-species plasmas(2017)10 cited
- → How to determine the relative ion concentrations of multiple-ion-species plasmas generated in the multi-dipole filament source(2015)7 cited
- → Vacuum pump age effects by the exposure to the corrosive gases on the Cr etch rate as observed using optical emission spectroscopy in an Ar/O2/Cl2 mixed plasma(2016)7 cited