Jane P. Chang
Harvard University(US)University of California, Los Angeles(US)Pfizer (United States)(US)Harvard University Press(US)University of California System(US)
Publications by Year
Research Areas
Semiconductor materials and devices, Plasma Diagnostics and Applications, Electronic and Structural Properties of Oxides, Copper Interconnects and Reliability, Advancements in Semiconductor Devices and Circuit Design
Most-Cited Works
- → Development of hafnium based high-k materials—A review(2011)573 cited
- → Infrared spectroscopic analysis of the Si/SiO2 interface structure of thermally oxidized silicon(2000)257 cited
- → Dielectric property and thermal stability of HfO2 on silicon(2002)242 cited
- → Lecture Notes on Principles of Plasma Processing(2003)217 cited
- → Electrical performance of Al2O3 gate dielectric films deposited by atomic layer deposition on 4H-SiC(2007)171 cited
- → Kinetic study of low energy ion-enhanced polysilicon etching using Cl, Cl2, and Cl+ beam scattering(1997)146 cited
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