Deborah M. Pollina
University of Illinois Urbana-Champaign(US)Urbana University(US)
Publications by Year
Research Areas
Metal and Thin Film Mechanics, Semiconductor materials and devices, Copper Interconnects and Reliability, Semiconductor materials and interfaces, Advanced materials and composites
Most-Cited Works
- → Titanium, zirconium, and hafnium tetrahydroborates as "tailored" CVD precursors for metal diboride thin films(1988)143 cited
- → "Tailored" organometallics as precursors for the chemical vapor deposition of high-purity palladium and platinum thin films(1988)115 cited
- → Organometallic route to the chemical vapor deposition of titanium carbide films at exceptionally low temperatures(1987)85 cited
- → Tailored Organometallics as Low-Temperature CVD Precursors to Thin Films(1988)25 cited
- → Amorphous Titanium Carbide Films Produced by Low-Temperature Organometallic CVD(1987)8 cited
- → ChemInform Abstract: “Tailored” Organometallics as Precursors for the Chemical Vapor Deposition of High‐Purity Palladium and Platinum Thin Films.(1988)
- → ChemInform Abstract: Organometallic Route to the Chemical Vapor Deposition of Titanium Carbide Films at Exceptionally Low Temperatures.(1987)
- → ChemInform Abstract: Titanium, Zirconium, and Hafnium Tetrahydroborates as “Tailored” CVD Precursors for Metal Diboride Thin Films.(1988)