Roberto Fallica
IMEC(BE)
Publications by Year
Research Areas
Advancements in Photolithography Techniques, Integrated Circuits and Semiconductor Failure Analysis, Electron and X-Ray Spectroscopy Techniques, Phase-change materials and chalcogenides, Chalcogenide Semiconductor Thin Films
Most-Cited Works
- → Absorption coefficient of metal-containing photoresists in the extreme ultraviolet(2018)81 cited
- → Dynamic absorption coefficients of chemically amplified resists and nonchemically amplified resists at extreme ultraviolet(2016)78 cited
- → Organometallic carboxylate resists for extreme ultraviolet with high sensitivity(2015)52 cited
- → Thermal and Electrical Characterization of Materials for Phase-Change Memory Cells(2009)49 cited
- → Effect of nitrogen doping on the thermal conductivity of GeTe thin films(2013)43 cited
- → SnOx high-efficiency EUV interference lithography gratings towards the ultimate resolution in photolithography(2016)41 cited
- → Effect of molecular weight on the EUV-printability of main chain scission type polymers(2020)37 cited
- → Metal Organic Chemical Vapor Deposition of Phase Change Ge1Sb2Te4Nanowires(2012)35 cited
- → Selective Surface Smoothening of Polymer Microlenses by Depth Confined Softening(2017)32 cited
- → Dynamic absorption coefficients of CAR and non-CAR resists at EUV(2016)30 cited