Timo Sajavaara
University of Jyväskylä(FI)
Publications by Year
Research Areas
Semiconductor materials and devices, Electronic and Structural Properties of Oxides, Ion-surface interactions and analysis, Metal and Thin Film Mechanics, Integrated Circuits and Semiconductor Failure Analysis
Most-Cited Works
- → Atomic Layer Deposition of Oxide Thin Films with Metal Alkoxides as Oxygen Sources(2000)483 cited
- → Atomic Layer Deposition of Platinum Thin Films(2003)385 cited
- → Effect of water dose on the atomic layer deposition rate of oxide thin films(2000)257 cited
- → Potku – New analysis software for heavy ion elastic recoil detection analysis(2014)245 cited
- → Atomic Layer Deposition of Photocatalytic TiO2 Thin Films from Titanium Tetramethoxide and Water(2004)217 cited
- → Atomic Layer Deposition of Hafnium Dioxide Films from Hafnium Tetrakis(ethylmethylamide) and Water(2002)197 cited
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