Sangmin Jeong
Jeonbuk National University(KR)
Publications by Year
Research Areas
Plasma Diagnostics and Applications, Industrial Vision Systems and Defect Detection, Metal and Thin Film Mechanics, Welding Techniques and Residual Stresses, Semiconductor materials and devices
Most-Cited Works
- → Effect on plasma and etch-rate uniformity of controlled phase shift between rf voltages applied to powered electrodes in a triode capacitively coupled plasma reactor(2008)39 cited
- → Enhancement of the Virtual Metrology Performance for Plasma-Assisted Oxide Etching Processes by Using Plasma Information (PI) Parameters(2015)38 cited
- → An analytical solution for transient temperature distribution in fillet arc welding including the effect of molten metal(1997)13 cited
- → Characteristics of a plasma information variable in phenomenology-based, statistically-tuned virtual metrology to predict silicon dioxide etching depth(2019)11 cited
- → Study of fluorocarbon plasma in 60 and 100MHz capacitively coupled discharges using mass spectrometry(2008)8 cited
- → Vacuum pump age effects by the exposure to the corrosive gases on the Cr etch rate as observed using optical emission spectroscopy in an Ar/O2/Cl2 mixed plasma(2016)7 cited
- → A hybrid cutting technology using plasma and end mill for decommissioning of nuclear facilities(2021)6 cited
- Role of features in plasma information based virtual metrology (PI-VM) for SiO2 etching depth(2019)
- → Control of Cathode Arc Root Behavior in a Reverse Polarity Hollow Electrode Plasma Torch Using an Exit Nozzle(2021)2 cited
- → Precipitation of Tin Oxide Nanoparticles on Graphene Sheets Using a Liquid Phase Plasma Process(2017)1 cited