Hsien-Min Chang
Powerchip (Taiwan)(TW)United Microelectronics (Taiwan)(TW)
Publications by Year
Research Areas
Advancements in Photolithography Techniques, Industrial Vision Systems and Defect Detection, Advanced Surface Polishing Techniques, Electron and X-Ray Spectroscopy Techniques, Semiconductor materials and devices
Most-Cited Works
- → Lithographic plane review (LPR) for sub-32nm mask defect disposition(2010)12 cited
- → Mask contribution to intra-field wafer overlay(2014)7 cited
- → Novel Poly Gate Shaping by Wet Etch Process in 2xnm NAND Flash Device and Beyond(2014)1 cited
- → Efficiency and throughput improvement on defect disposition through automated defect classification(2011)1 cited
- → Enabling virtual wafer CD (WCD) using inverse pattern rendering (IPR) of mask CD-SEM images(2011)