C. Grant Wilson
Publications by Year
Research Areas
Advancements in Photolithography Techniques, Nanofabrication and Lithography Techniques, Electron and X-Ray Spectroscopy Techniques, Silicon and Solar Cell Technologies, Advanced Surface Polishing Techniques
Most-Cited Works
- → Design of orientation stages for step and flash imprint lithography(2001)105 cited
- → Study of resolution limits due to intrinsic bias in chemically amplified photoresists(1999)60 cited
- → A Decade of Step and Flash Imprint Lithography(2009)37 cited
- → Photogenerated amines and their use in the design of a positive-tone resist material based on electrophilic aromatic substitution(1991)25 cited
- → Positive/Negative Mid Uv Resists With High Thermal Stability(1987)24 cited
- → Step and Flash Imprint Lithography Modeling and Process Development(2004)16 cited
- → Fundamental study of photoresist dissolution with real time spectroscopic ellipsometry and interferometry(2003)10 cited
- → A New Materials-based Pitch Division Technique(2009)7 cited
- → Line Edge Roughness in Chemically Amplified Resist: Speculation, Simulation and Application(2005)4 cited
- → Growing Contributions of Nano in 2020(2020)1 cited