S. Roth
Publications by Year
Research Areas
Semiconductor materials and devices, Advanced MEMS and NEMS Technologies, Advancements in Semiconductor Devices and Circuit Design, Integrated Circuits and Semiconductor Failure Analysis, Advancements in Photolithography Techniques
Most-Cited Works
- → Using Imaging Spectroscopy To Map Acidic Mine Waste(1999)263 cited
- → High aspect ratio UV photolithography for electroplated structures(1999)71 cited
- → A new fabrication method for borosilicate glass capillary tubes with lateral inlets and outlets(1997)69 cited
- → Fabrication process of high aspect ratio elastic structures for piezoelectric motor applications(2002)63 cited
- → Fabrication process of high aspect ratio elastic and SU-8 structures for piezoelectric motor applications(1998)62 cited
- → Advanced deep reactive ion etching: a versatile tool for microelectromechanical systems(1998)56 cited
- → Polysilicon encapsulated local oxidation(1991)30 cited
- → Two steps micromoulding and photopolymer high-aspect ratio structuring for applications in piezoelectric motor components(1998)29 cited
- → Characterization of polysilicon-encapsulated local oxidation(1992)16 cited
- A New Fabrication Method of Borosilicate Glass Capillary Tubes with Laterial Inlets and Outlets(1996)