Two steps micromoulding and photopolymer high-aspect ratio structuring for applications in piezoelectric motor components
Microsystem Technologies1998Vol. 4(3), pp. 147–150
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L. Dellmann, S. Roth, C. Beuret, L. Paratte, G.-A. Racine, H. Lorenz, M. Despont, Philippe Renaud, P. Vettiger, Ν. F. de Rooij
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