Joy Cheng
IBM Research - Almaden(US)Taiwan Semiconductor Manufacturing Company (Taiwan)(TW)
Publications by Year
Research Areas
Block Copolymer Self-Assembly, Advanced Polymer Synthesis and Characterization, Advancements in Photolithography Techniques, Nanofabrication and Lithography Techniques, Machine Learning in Materials Science
Most-Cited Works
- → Nanostructure engineering by templated self-assembly of block copolymers(2004)705 cited
- → Dense Self‐Assembly on Sparse Chemical Patterns: Rectifying and Multiplying Lithographic Patterns Using Block Copolymers(2008)306 cited
- → Simple and Versatile Methods To Integrate Directed Self-Assembly with Optical Lithography Using a Polarity-Switched Photoresist(2010)216 cited
- → Three‐Dimensional Nanofabrication by Block Copolymer Self‐Assembly(2014)171 cited
- → Two-Dimensional Pattern Formation Using Graphoepitaxy of PS-b-PMMA Block Copolymers for Advanced FinFET Device and Circuit Fabrication(2014)154 cited
- → Self-assembly patterning for sub-15nm half-pitch: a transition from lab to fab(2011)106 cited
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